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Polishing

NYACOL® offers colloidal alumina, ceria, silica and zirconia for polishing applications. NYACOL® generally supplies the abrasive as a raw material for formulating slurries, but in some cases the dispersion can be used as supplied.

For the polishing of silicon wafers, NexSil 85-40 and 125-40 are recommended as the abrasive for stock polish slurries. NexSil 6000 is supplied with a rate accelerating additive for use in single pass or recycle applications.

For STI and ILD CMP processes, cerium oxide is used.  NYACOL® Ce120/10 is calcined ceria and is being offered as an abrasive for high selectivity STI slurries.

For ILD slurries, NexSil 85K-40 is the preferred abrasive for the formulation of ILD slurries. NexSil 85K-40 provides competitive performance with other colloidal silicas or fumed silica based slurries. We can provide a ready to use slurry if required.  Ce120/10 can also be used in place of silica for ILD slurries.  The solids loading of cerium oxide is much lower than colloidal silica for the same removal rate.

CMP is a complicated area and the choice of abrasive depends on the film or films being polished and the requirements of the applications. Our colloidal silica acid sols are typically a good choice for starting the formulation of the slurry and we can assist with custom chemistry for your application.

Sapphire and silicon carbide are hard wafer/film materials which are surprisingly polished successfully with colloidal silica. NexSil 85-40 and 125-40 are good choices for sapphire wafer polishing. We can provide expected results for C-plane and A-plane sapphire. Silicon carbide requires special chemistry to be used with our 85-40 and 125-40 abrasives, please contact NYACOL® to discuss.

We also offer specialty abrasives for GaAs, germanium, InP and other compound semiconductors.

Looking for More Options?

In some cases our standard materials are not suitable for a customer’s particular application, or a different composition is required. In these cases, we will consider a custom development project with our customers. We generally proceed under a Non-Disclosure Agreement and we will do the project in such a way that the material can be readily scaled up.

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